Product Description
This volume offers a solid foundation for understanding the most important devices used in the hottest areas of electronic engineering today, from semiconductor fundamentals to state-of-the-art semiconductor devices in the telecommunications and computing industries. Kevin Brennan describes future approaches to computing hardware and RF power amplifiers, and explains how emerging trends and system demands of computing and telecommunications systems influence the choice, design, and operation of semiconductor devices. In addition, he covers MODFETs and MOSFETs, short channel effects, and the challenges faced by continuing miniaturization. His book is both an excellent senior/graduate text and a valuable reference for practicing engineers and researchers. ... Read more

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This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials.Every known property of silicon is detailed.A complete set of binary phase diagrams is included.Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth.

Fundamentals in the areas of silicon precursor compounds, polysilicon, silicon crystal growth, wafer fabrication, epitaxial and CVD deposition are addressed by experts in these fields.Materials properties covered include electrical, optical and mechanical properties, deep level impurities and carrier lifetime, and thermochemistry, as well as specific sections on oxygen, carbon, and nitrogen impurities.The book contains an extensive set of references, tables of materials constants, and silicon properties, and a presentation on the state of the art of materials manufacturing. ... Read more

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The definitive reference on semiconductor characterization tools! Here, in one well-organized volume, are detailed explanations of the advanced and "traditional") techniques for evaluating virtually every criterion: crystal defects, impurity concentration, lifetime, film thickness, resistivity, and such critical electrical properties as mobility, Hall effect, and conductivity type. Reliable, high-accuracy methods of measuring hardness, stress, and various kinds of surface contamination are also included. In addition to its value as a practical everyday reference, the text also serves as an excellent user's guide to the latest methods of optical microscopy, scanning electron microscopy (SEM), electron microprobe analysis, transmission electron microscopy (TEM), Auger electron spectroscopy (AES), scanning probe microscopy (SPM), and secondary ion mass spectrometry (SIMS). This is the only guide that offers such "dual coverage" of its topic -- in terms of both measurements and tools. ... Read more

Customer Reviews (1)

useful variety of instruments and measurements
Don't be put off by the fact that the book was written in 1998. While Moore's Law is still ongoing in the semiconductor industry, much of the book's material is quite up to date. The measurement techniques are mostly fundamental. Runyan describes the many different properties of a semiconductor chip and how you can measure these. This is then related to how best the chip can be characterised. Or, in some cases, a given circuit.

Accompanying this is a natural complementary description of a variety of instruments. So the ideas behind such devices as a TEM or an SEM are explained. The quantum mechanical aspect of some of the measurements is gone into only slightly. Mostly directed at the experimentalist. ... Read more

Product Description
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control. ... Read more

Customer Reviews (2)

Run-to-Run Control Explained
Run-to-Run (R2R) control is a process control technique for batch-processing environments in which an algorithm is used to adjust process parameters prior to each batch (run). Information from previous runs, prior process inputs, or environmental information might all play a part in the control algorithm. The authors make a convincing point that run-to-run control has been very successful and has widespread application in the semiconductor industry, and is, in fact, "the least equipment-invasive control scheme that demonstrates real benefit."

This book is not a loose collection of case studies or a group of unrelated articles; it is, rather, a complete and integrated treatment of the subject of run-to-run control in its present state of development. The technical content exhibits the benefit of years of research through [the semiconductor research consortium] Sematech and excellent scholarship with over 300 references included. Both the theory of run-to-run control and the realities of implementation in modern manufacturing environments are covered.

[Excerpted with permission from review to appear in Journal of Quality Technology]

Run-to-Run Control in Semiconductor Manufacturing
Having only recently gained significant acceptance in the semiconductor industry, run-to-run (R2R) control has been shown to be a highly effective method for minimizing the influence of systematic variations on the performance of semiconductor manufacturing equipment. Consequently, this book should prove to be a timely and welcome addition to the library of any manufacturing technologist in the semiconductor industry. Intended for use by novices as well as experts, it covers both the theory and application of R2R control in the semiconductor industry. Written by contributors from both industry and academia, the book is organized into seven topical sections.For the benefit of readers new to the subject, each section is arranged so that the first few chapters in the section are introductory in nature.

The book begins with an historical overview of process control in the semiconductor industry and the reasons why R2R control has emerged as one of the key process control technologies in use in the industry today.The rest of the section traces the evolution of R2R control in the semiconductor industry, including the barriers to its implementation and the enabling technologies that have helped to overcome these barriers, and provides a brief introduction to R2R control and process optimization methods.

The second section of the book focuses on control algorithms and the application of these algorithms to R2R process optimization and control. Particular attention is paid to R2R algorithms based on the exponentially weighted moving average (EWMA) statistic such as the "gradual mode" and the "predictor-corrector" controllers. A significant advantage of these EWMA algorithms is that they are relatively easy to implement and they have been shown to work well for a variety of applications in the semiconductor industry. The rest of the section is devoted to several adaptive algorithms that can be used for both process optimization and control.The last chapter compares the performance of the R2R algorithms discussed in the previous chapters under a variety of conditions for both linear and non-linear processes.It should prove quite helpful to anyone trying to evaluate R2R control strategies.

The third section addresses the role of integration and automation in implementing R2R control in manufacturing environments.These are key enablers for R2R control and, as the authors note, if careful consideration is not given to them when implementing R2R control systems the solutions developed could turn out to be too costly or cumbersome to be useful.Because integration and automation span such a wide domain of technologies and disciplines, standards are absolutely vital to its success.Fortunately the first chapter in this section provides a thorough review of integration and automation standards that have been developed and proposed by organizations like SEMATECH, SEMI, and SIA.The subsequent chapters in this section address specific implementations of R2R control and the integration and automation strategies used with these implementations.A minor criticism of this section is the emphasis in these chapters on the Generic Cell Controller (GCC), although it should be noted that the authors have a wealth of experience with the application of the GCC to R2R control. The remaining sections of the book cover case studies of the application of R2R control to specific semiconductor manufacturing processes like Chemical Mechanical Polishing (CMP) and photolithography and advanced topics such as methods for dealing with process upsets and control strategies that span multiple process technologies.The book concludes with a discussion of the future of R2R control in semiconductor manufacturing and suggestions for further reading which are in addition to the thorough list of references included at the end of each chapter of the book.

In conclusion, this book is a very useful reference for any manufacturing technologist in the semiconductor industry.It provides a good introduction to the basics of R2R control and illustrates its application to semiconductor manufacturing with specific examples and case studies based on the authors personal experiences. ... Read more

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This book describes semiconductors from a materials science perspective rather than from condensed matter physics or electrical engineering viewpoints. It includes discussion of current approaches to organic materials for electronic devices. It further describes the fundamental aspects of thin film nucleation and growth, and the most common physical and chemical vapor deposition techniques. Examples of the application of the concepts in each chapter to specific problems or situations are included, along with recommended readings and homework problems.

Customer Reviews (1)

very good
this book introduce basic theory of chemical in semiconductor manufucture inductory ... Read more

Product Description
This handbook will provide engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations. Consolidating the many complex fields of semiconductor fundamentals and manufacturing into one volume by deploying a team of world class specialists, it allows the quick look up of specific manufacturing reference data across many subdisciplines. ... Read more

Customer Reviews (1)

Extremely Comprehensive
This book provides an excellent overview of all aspects of semiconductor manufacturing.Many books on semiconductor processing focus on the "front end" processing: ion implantation, lithography, thin film deposition and so on.These are, of course, critical steps in manufacturing integrated circuits, but there are many other aspects as well, such as metrology, clean room management, particles, yield management, material handling, and waste management.This is the only book I am aware of that covers everything.As the author of the CVD chapter, I may not be 100% objective, but I have found this handbook to be a great reference.

The downside of such a comprehensive book is it can not go into each topic in great depth.And because many authors contributed, there is some unevenness from chapter to chapter.But overall, this is an excellent resource for people who need to understand modern techniques of semiconductor manufacturing. ... Read more

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Semiconductor devices are ubiquitous in the modern computer and telecommunications industry. A precise knowledge of the transport equations for electron flow in semiconductors when a voltage is applied is therefore of paramount importance for further technological breakthroughs.

In the present work, the author tackles their derivation in a systematic and rigorous way, depending on certain key parameters such as the number of free electrons in the device, the mean free path of the carriers, the device dimensions and the ambient temperature. Accordingly a hierarchy of models is examined which is reflected in the structure of the book: first the microscopic and macroscopic semi-classical approaches followed by their quantum-mechanical counterparts.

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This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.

Customer Reviews (1)

CMP:An Overview
This is an outstanding book.It provides an overview of the current status of CMP and serves as a significant update to Steigerwald's 1997 book, which summarized the state of CMP knowledge (which began for electronic applications in 1991)at that time.Much has happened in the second half of CMP's existence.

The book is well edited by Mike Oliver.It includes chapters written by well known CMP specialists that focus on process aspects (technology, equipment, pads, cleaning), on metals (theory and applications), on slurries, and on patterned wafers.It also provides chapters with overviews of CMP.Each chapter has extensive references.

The individual chapters are carefully written to offer an introduction and broad perspectives to new CMP workers while providing depth of insight and material for experienced practitioners.This is an ideal book for advanced undergraduates and graduate students who are working in the field and for those who are starting to do planarization of semiconductor materials.It is also an ideal reference book for experienced polishers since it gives information about the process at a level that is useful and insightful.

I have found the book very useful to me both for its clear summaries of material that I already know about and for its helpful explanations of areas that I am not familiar with.I highly recommend it.







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Widely considered by experts to be a classic in the field of solid-state physics, J. S. Blakemore's Semiconductor Statistics in this hardcover edition explores in depth the implications of carrier populations and Fermi energies--quantities not measured directly but inferred from experimental observations. Part I of the book considers a semiconductor at or near thermodynamic equilibrium, and Part II examines the additional complexities of an overtly non-equilibrium condition. Directed to advanced graduate students and experimentalists in the field, the book is unique in its extensive treatment of the various ways an electron can make a transition between a multitude of levels, depending upon the environment. First discussing basic concepts in the electron theory of solids, Part I of the book, primarily concerned with statistics, explores the distribution of electrons in energy bands and impurity levels of semiconductors as a function of temperature, impurity density and other factors. Part II covers the kinetics of semiconductors containing excess carriers and is especially thorough on trapping, excitation and recombination. Unabridged, corrected and slightly enlarged Dover republication of the edition published by Pergamon Press, New York, 1962 (Vol. 3 in the International Series of Monographs on Semiconductors, edited by Heinz K. Henisch). Index. Bibliography. New Preface. Appendixes with tables. 141 illustrations.
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Since the publication of the second edition of this core text, the field of semiconductor electronics has evolved extensively. In the light of these developments, this third edition, whilst retaining its presentation of semiconductors and electronic devices, covers new technologies and materials. The text is structured for a balance between physics and electronics, and aims to give students a good understanding of how the electrical parameters of all the major, present-day semiconductor devices relate to the physics of that device; its material, its structure and its operating conditions. This text is intended for second and third year undergraduate students on courses in semiconductor devices, electronic devices and solid state devices in departments of electrical and electronic engineering, chemical engineering and physics. ... Read more

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Illustrating the concepts of modern physics and quantum mechanics needed for R&D into semiconductors, this textbook first provides the necessary background before going on to cover condensed matter and semiconductors, and how to develop them. Throughout, it emphasizes the development of ideas and concepts and how they are interrelated, deepening an understanding of the concepts by way of repetition. Written with clarity and style in mind, the text covers such new technology as junctions, luminescence, and 3D quantum dots, and each chapter ends with 20-30 exercises. ... Read more

Customer Reviews (1)

An important text or supplement for physics or engineering students
This book, which should be a welcome addition to the field, covers physical concepts leading to semiconducting devices and acts as a bridge between physics and applications. Written by Dr. Charles C. Coleman in an easy-to-understand conversational style, the book points out where similar physical models can describe different physical processes, which makes it much easier to see where final equations come from.

Dr. Coleman also points out places where there can be confusion in ideas or notation. There are useful examples and problems, an approach that makes it easier to determine which physical concepts apply to each problem and hence "which equation to use."I would recommend it as a text or as a supplement for engineering and physics students interested in how and why semiconducting devices operate or as a reference to fill in physical details that are often misunderstood.
... Read more

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Allows those who have some familiarity with semiconductor physics and devices to broaden and expand their knowledge into new and expanding topics in low-dimensional semiconductors. Provides pedigogical coverage of selected areas of new and pertinent physics of low-dimensional structures and a perspective of the latest optoelectronic devices under development.Softcover. ... Read more

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As we approach the end of the twentieth century, the information revolution has significantly changed our life.Understanding the materials of semiconductors in terms of semiconductors devices is the driving force for both the microelectronics revolution and further study of physical effects in semiconductors.However, this is not a device book.It is about transport properties and their calculation.Those aspects of solid-state physics that distinguish semiconductors from other materials and the properties that are vitally important to understanding the transport in materials. ... Read more

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Exposes readers to device principles and recent developments and offers a thorough grounding in the physical principles of semiconductors. Covers electronic structure of ideal crystals, and electronic system in thermodynamic equilibrium. ... Read more

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A one-stop resource on all aspects of semiconductor wafer bonding for materials scientists and electrical engineers

Semiconductor Wafer Bonding addresses the entire spectrum of mainstream and likely future applications of wafer bonding. It examines all of the important issues surrounding this technology, including basic interactions between flat surfaces, the influence of particles, surface steps and cavities, surface preparation and room-temperature wafer bonding, thermal treatment of bonded wafer pairs, and much more.

This unique, one-stop resource consolidates information previously available only by time-consuming searches through technical journals, proceedings, and book chapters for more than 1,000 published articles on wafer bonding. It covers all materials used for wafer bonding-including silicon, III-V compounds, fused and crystalline quartz, glass, silicon carbide, sapphire, ferroelectrics, and many others.

For materials scientists and electrical engineers who need to exploit the potential of this flourishing technology, Semiconductor Wafer Bonding is a convenient one-stop resource for answers to many common questions. It is also an excellent text/reference for graduate students eager to learn about this interdisciplinary field, which spans surface chemistry, solid-state physics, materials science, and electrical engineering. ... Read more

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Process Technology for Semiconductor Lasers describes the design principles of semiconductor lasers, mainly from the fabrication point of view. A review is given of the history of semiconductor-laser development and applications and of the materials used in lasing at short to long wavelengths. The basic design principles for semiconductor-laser devices and the epitaxy for laser production are discussed. An entire chapter is devoted to the technology of liquid-phase epitaxy, and another one to vapor-phase and beam epitaxies. The characterizations of laser materials and the fabrication and characteristics of semiconductor lasers are treated. Mode-control techniques are presented, and surface-emitting lasers are introduced in the final chapter. ... Read more